@article{PhysRevFocus.23.4,
  title = {Copper, Sputter Thyself},
  author = {Monroe, Don},
  journal = {Phys. Rev. Focus},
  volume = {23},
  issue = {},
  pages = {4},
  numpages = {1},
  year = {2009},
  month = {Feb},
  doi = {10.1103/PhysRevFocus.23.4},
  url = {http://link.aps.org/doi/10.1103/PhysRevFocus.23.4},
  publisher = {American Physical Society}
}