@article{PhysRevFocus.26.7, title = {Corrosion Makes Precision Cuts in Silicon}, author = {Cartlidge, Edwin}, journal = {Phys. Rev. Focus}, volume = {26}, issue = {}, pages = {7}, numpages = {1}, year = {2010}, month = {Aug}, doi = {10.1103/PhysRevFocus.26.7}, url = {http://link.aps.org/doi/10.1103/PhysRevFocus.26.7}, publisher = {American Physical Society} }