TY  - JOUR
PB  - American Physical Society
ID  - 10.1103/PhysRevFocus.26.7
TI  - Corrosion Makes Precision Cuts in Silicon
JF  - Physical Review Focus
JA  - Phys. Rev. Focus
J1  - FOCUS
VL  - 26
IS  - 
SP  - 7
EP  - 
PY  - 2010/08/13/
UR  - http://link.aps.org/doi/10.1103/PhysRevFocus.26.7
A1  - Cartlidge, Edwin
ER  -