@article{PhysRevFocus.3.4, title = {A New Theory of Etching}, author = {Robinson, Arthur}, journal = {Phys. Rev. Focus}, volume = {3}, issue = {}, pages = {4}, numpages = {1}, year = {1999}, month = {Jan}, doi = {10.1103/PhysRevFocus.3.4}, url = {http://link.aps.org/doi/10.1103/PhysRevFocus.3.4}, publisher = {American Physical Society} }