@article{PhysRevFocus.6.26,
  title = {The Most Accurate Defect Measurement},
  author = {Anonymous},
  journal = {Phys. Rev. Focus},
  volume = {6},
  issue = {},
  pages = {26},
  numpages = {1},
  year = {2000},
  month = {Dec},
  doi = {10.1103/PhysRevFocus.6.26},
  url = {http://link.aps.org/doi/10.1103/PhysRevFocus.6.26},
  publisher = {American Physical Society}
}