TY  - JOUR
PB  - American Physical Society
ID  - 10.1103/PhysRevFocus.6.26
TI  - The Most Accurate Defect Measurement
JF  - Physical Review Focus
JA  - Phys. Rev. Focus
J1  - FOCUS
VL  - 6
IS  - 
SP  - 26
EP  - 
PY  - 2000/12/11/
UR  - http://link.aps.org/doi/10.1103/PhysRevFocus.6.26
A1  - Anonymous, 
ER  -