Figure 1
Credit: J. Etheridge et al. [5]

Figure 1: Sketch of the experimental setup used by Etheridge et al. [5]. The first lens, above the specimen, forms a small electron probe, which is focused to the specimen plane. The electron probe is scattered inside the zone-axis oriented crystalline specimen. A second lens beneath the specimen forms an image of the electron probe as it is scattered in the crystal. The annular detector in the image plane is used to record a R-STEM image, which is needed to precisely position the electron probe on a point of interest in the specimen plane.